Abstract
We describe a micro glucose sensor based on glucose oxidase modified mesoporous carbon electrode that is direct prototyped on silicon wafer. Advantages are shown using mesoporous carbon film as working electrode for an amperometric glucose sensor in two aspects. One is that the mesoporous carbon has appropriate pore size, which leads to a high glucose oxidase (GOx) loading and thus improves the sensitivity of the glucose sensor; The other is that direct prototyping of the mesoporous carbon film on silicon wafer allows for scalable design, batch fabrication and compatible integration with micro-fluid chips and micro systems. The mesoporous carbon film sensor shows a linear detecting range from 0.5 to 5 mM and a response time of < 20 s. Sensing performance of the glucose sensor with different mesoporous cabon film thicknesses were tested and compared to achieve a high sensitivity of 0.194 mA/(mM cm(2)) with a 4-mu m-thick mesoporous carbon film sample.